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產品詳細
| 項目ltem | 規格spec |
| 設備外形尺寸 (Equipment dimension) | 2500x2500X2800 |
| 拋光盤直徑 (Disc diameter) | 900mm |
| 拋光頭數量 (Number of polishing head) | 3PCS |
| 吸附盤直徑 (Adsorption disc diameter) | 420mm |
| 吸附盤數量 (Number of adsorption disks) | 12PCS |
| 單次拋光數量 (Number of polishing in one time ) | 63PCS |
| 下盤轉速 (Footwall of speed) | 0~22 rpm |
| 上拋光盤轉速 (Upcast disc speed) | 0~270 rpm |
| 氣源壓力 (Air pressure) | 0.5-0.6Mpa |
| 真空負壓 (Vacuum negative pressure) | ≤-0.08 Mpa |
| 設備總功率 (Total equipment power) | 28kw |
| 設備重量 ( Equipment weight） | ≈6500kg |
